SAFETY MATERIAL DATA SHEET
AZ(R) 300 MIF DEVELOPER Substance key: BBG70N4 Version REVISION DATE: 07/25/2005 Print Date: 07/25/2005
Section 01 - Product Information
Identification of the company: AZ Electronic Materials USA Corp. 70 Meister Avenue Somerville, NJ 08876 Telephone No.: 800-515-4164 Information on the substance/preparation Product Safety: 908-429-3562 Emergency Tel. number: 800-424-9300 CHEMTREC Trade name: AZ(R) 300 MIF DEVELOPER
Section 02 - Composition information
Hazardous ingredients: Chemical Name Tetramethylammonium hydroxide Non-hazardous ingredients: Chemical Name Water CAS-no. (Trade secret no.) 7732-18-5 Concentration [%] 98.00 CAS-no. (Trade secret no.) 75-59-2 Concentration [%] 2.00 - 0.00
Section 03 - Hazardous identification
Emergency overview: Expected route of entry Skin contact: Ingestion: Inhalation: Eye contact: Health effects of exposure: Component information: Eye: Causes severe eye irritation. Skin: Causes moderate skin irritation. Toxic by skin absorption. Inhalation: No hazard in normal industrial use. Ingestion: May be harmful if swallowed. Reproductive and birth defects: No information. Systemic effects: No hazard in normal industrial use. Clear liquid with slight amine odor., Noncombustible., Causes moderate skin irritation., Causes moderate eye irritation., Water soluble. Causes moderate skin irritation. May be harmful if swallowed. No hazard in normal industrial use. Causes moderate eye irritation.
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MATERIAL SAFETY DATA SHEET
AZ(R) 300 MIF DEVELOPER Substance key: BBG70N4 Version REVISION DATE: 07/25/2005 Print Date: 07/25/2005
Tetramethylammonium hydroxide (75-59-2) Tetramethylammonium hydroxide may cause severe irritation or caustic burns to eyes and mucous membranes. TMAH is caustic and corrosive to skin and eyes in concentrated form. Pure TMAH is highly toxic in animal tests by the oral and dermal routes of exposure. Listed carcinogen: HMIS: Health: 2 NFPA: Health: 2 IARC: NO NTP: NO Reactivity: 0 Reactivity: 0 OSHA: NO Personal protection: X Special notice: NONE
Flammability: 0 Flammability: 0
Section 04 - First aid measures
After inhalation: After contact with skin: Remove victim to fresh air. Consult physician if irritation occurs. Consult physician if exposure is extensive or if irritation occurs. Immediately remove contaminated clothing and wash affected area thoroughly with soap and water. Flush thoroughly with water for 15 minutes. Get immediate medical help. If person is conscious, give water or milk to dilute stomach contents. Never give anything by mouth to an unconscious person. Consult physician. Do not induce vomiting. A component of this material causes severe acute toxicity in experimental animals by the oral or dermal route of exposure. Exposed individuals should be cafefully observed and treated according to symptoms.
After contact with eyes: After ingestion:
Advice to doctor / Treatement:
Section 05 - Fire fighting measures
Flash point: Water-based material with low organic content., Compatible with extinguishing agents.
Section 06 - Accidental release measures
Steps to be taken in case of spill or leak: Wearing appropriate personal protective equipment, contain spill, collect onto inert absorbent, and place in a suitable container. Rinse residual with water.
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MATERIAL SAFETY DATA SHEET
AZ(R) 300 MIF DEVELOPER Substance key: BBG70N4 Version REVISION DATE: 07/25/2005 Print Date: 07/25/2005
Section 07 - Handling and Storage
Advice on safe handling: Use only with adequate ventilation and proper protective eyewear, gloves, and clothing. Further information for storage conditions: Store at appropriate temperature. See label for details. Store in original container. Keep from freezing.
Section 08 - Exposure Control / personal protection
Skin and body protection: Additional advice on system design: Clothing suitable to prevent skin contact. Where mist is present, provide local exhaust ventilation or a respirator certified for mist by NIOSH.
Section 09 - Physical and chemical properties
Form: Color: Odor: pH: Water solubility: Density: Boiling point: Loss on drying: Liquid Clear, colorless Slight amine odor. 13.3 soluble 1 g/cm3 100 C 97.6 %
Section 10 - Stability and reactivity
Hazardous reactions: Hazardous polymerization: Conditions to avoid: Stable. Will not occur. Avoid contact with strong acids. This product is expected, by test or analogy, to slowly attack aluminum and perhaps other
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MATERIAL SAFETY DATA SHEET
AZ(R) 300 MIF DEVELOPER Substance key: BBG70N4 Version REVISION DATE: 07/25/2005 Print Date: 07/25/2005
nonferrous metals, releasing hydrogen gas.
Section 11 - Toxiclogical information
Acute oral toxicity: Testing in animals shows that this material is, harmful (rat acute oral LD50 between 500 and 5000mg/kg).
Tetramethylammonium hydroxide (75-59-2) rat LD50 Acute oral toxicity: 50 mg/kg as chloride salt Tetramethylammonium hydroxide (75-59-2) No data. Acute inhalation toxicity Tetramethylammonium hydroxide (75-59-2) LD50 Guinea pig Acute dermal toxicity: 25 mg/kg not determined
Section 12 - Ecological information
Tetramethylammonium hydroxide (75-59-2) LC50 Toxicity to fish: 35.1 mg/l Tetramethylammonium hydroxide (75-59-2) EC50 Toxicity of aquatic 0.21 mg/l invertebrates: Tetramethylammonium hydroxide (75-59-2) No data available. Toxicity to algae :
Section 13 - Disposal considerations
Product: Consult local, state, and federal regulations. This product would be considered a hazardous waste under RCRA due to high pH unless neutralized prior to disposal.
Section 14 - Transport information
Land transport DOT:
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MATERIAL SAFETY DATA SHEET
AZ(R) 300 MIF DEVELOPER Substance key: BBG70N4 Version
Not restricted Sea transport IMDG:
REVISION DATE: 07/25/2005 Print Date: 07/25/2005
UN-No: Proper technical name: Class: Packaging group: Marine pollutant: EmS: MFAG: Labels:
Air transport ICAO/IATA-DGR:
1719 Caustic alkali liquid, n.o.s. contains (Tetramethylammonium hydroxide, solution) 8 III F-A, S-B 8
UN/ID No.: Proper technical name: Class: Packaging group: Labels:
UN 1719 Caustic alkali liquid, n.o.s. contains (Tetramethylammonium hydroxide, solution) 8 III 8
Section 15 - Regulatory information
TSCA Status: SARA (section 311/312): All components of this product are listed on the TSCA Inventory. Reactive hazard: no Pressure hazard: no Fire hazard: no Immediate/acute: yes Delayed/chronic: no This product is not subject to SARA Title III Section 313 reporting requirements under 40 CFR 372.
SARA 313 information:
Section 16 - Other information
Further information
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MATERIAL SAFETY DATA SHEET
AZ(R) 300 MIF DEVELOPER Substance key: BBG70N4 Version REVISION DATE: 07/25/2005 Print Date: 07/25/2005
The tetramethylammonium ion (TMA), as TMAH, in this developer is toxic at low levels to the water flea ceriodaphnia dubia (CD) used in the whole effluent toxicity (WET) biomonitoring test. Data from the supplier suggests that continuous input of 60-100 ppm TMA to a small POTW should not cause WET toxicity. It is expected that discharges to a sizable POTW will not affect the ability to pass the WET tests. However, discharges to a small POTW or direct discharges to surface waters should be carefully reviewed. Contact AZ Electronic Materials Product Safety for additional information (908429-3593 or 908-429-3562). Label information DANGER! Alkaline solution. Contains material that may be highly toxic. May cause severe skin and eye irritation. May cause corneal damage. Dry or concentrated residue may be corrosive. Avoid breathing mist, and avoid contact with skin, eyes, and clothing. Use only with adequate ventilation, and proper protective eyewear, gloves, and clothing. Wash thoroughly after handling. Keep container closed. In case of contact, flush eyes with plenty of water for 15 minutes. Get medical attention immediately. Flush affected skin areas with water, and wash with mild soap and water. Remove contaminated clothing. If INHALED, remove individual to fresh air. If breathing is difficult, give oxygen. If ingested, give water or milk to dilute stomach contents. Do not induce vomiting. Never give anything by mouth to an unconscious person. Get medical attention immediately for ingestion or breathing problems or if skin contact is extensive. If spilled, wear protective clothing, absorb with inert material, collect and place in a chemical waste container. Rinse residue with water. Keep sealed in original container. Avoid freezing and direct sunlight. Product should be stored > 32 F (0 C). Empty container may contain harmful residue. The solvent in this product is not photochemically reactive per Rule 102 of the California South Coast Air Quality Management District.
This information is supplied under the OSHA Hazard Communication Standard, 29 CFR 1910.1200, and is offered in good faith based on data available to us that we believe to be true and accurate. The recommended industrial hygiene and safe handling procedures are believed to be generally applicable to the material. However, each user should review these recommendations in the specific context of the intended use and determine whether they are appropriate for that use. No warranty, express or implied, is made regarding the accuracy of this data, the hazards connected with the use of the material, or the results to be obtained from the use thereof. We assume no responsibility for damage or injury from the use of the product described herein. Data provided here are typical and not intended for use as product specifications. (R) and TM indicate trademarks of AZ Electronic Materials USA Corp., its business partners and suppliers.
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