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Unformatted text preview: section view should include at least the gate, source and drain of both the NMOS and the PMOS transistor. Please label all important components in the figure. 3. (5 points) Please discuss the impact to circuit performance if the CMP (Chemical-Mechanical Polishing) is not performed well. 4. (5 points) Please draw the photo-masks of diffusions and poly for a CMOS inverter using a. positive photo-resist b. negative photo-resist Please make sure that the diffusions and poly can be well-aligned....
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This note was uploaded on 04/17/2008 for the course ELEN 454 taught by Professor Jianghu during the Spring '08 term at Texas A&M.
- Spring '08