# HW_4 - ECE 432 Introduction to MEMS Homework 4(Due in class...

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ECE 432 Introduction to MEMS Sunil Bhave Homework 4 (Due in class on Monday, 10/1/2007) Fall 2007 1. Cantilever under uniform distributed load a. Using the definition of moment, derive the result for the moment across a uniformly loaded cantilever beam to be M(x) = ( ρ/229 (L-x) 2 . Here ρ is the load per unit length. b. Derive the result for y(x) 2. Bending under gravity Use the results from Question 1 for the polysilicon beam given below. Let g = 2 μ m, thickness = 2 μ m , and w = 10 μ m. a. How much does the beam given below bend under its own weight if L = 30 μ m. Density of polysilicon is 2330 Kg/m 3 . b. How long does the beam have to be to touch the bottom on its own weight? L g w 3. L-suspension You are designing a suspension using two constant-cross-section beams with width

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Unformatted text preview: W (in the plane of the paper) and thickness t (into the plane of the paper). One beam is anchored to the substrate and has length L x , the other is attached to the end of the first beam at a 90 degree angle and has length L y . When you apply a force along the x axis and measure x deflection you want to get the same result as when you apply a force along the y axis and measure a y deflection. Calculate the ratio of the lengths of the two beams. 4. L-suspension in Ansys Read the Users Manual and run through the examples. Verify your analytical result for the L-suspension spring using static numerical analysis in Ansys....
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