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Unformatted text preview: NATIONAL TECHNOLOGICAL UNIVERSITY IC 792CA Fall 2001 Introduction to MEMS (UC Berkeley EECS 245) Homework Assignment #7 (Due Nov. 29th) Page 1 of 4 Problem 1: Actuator in DRIE process Assuming a DRIE aspect ratio S, a minimum feature size , a material density , and a maximum voltage V, a) calculate the force per unit area of an ideal gap-closing actuator array. (Use the zero- deflection force, not the force after pull-in; you may assume some magical sublithographic gap stop if you like). 2 2 2 1 tl V F = t: thickness of film, l: length of actuator finger, : gap of actuator Area of an ideal gap-closing actuator array: 5 *l So: Force per unit layout area of an ideal gap-closing actuator array: F/(5 l)= tV 2 /(10 3 ) b) Calculate the force output per kilogram, assuming a film thickness t. Will micro robots with gap closing electrostatic actuators be able to lift themselves without massive gearing or levers?...
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This note was uploaded on 02/22/2008 for the course ECE 4320 taught by Professor Bhave during the Fall '07 term at Cornell University (Engineering School).
- Fall '07