10kPaOn-Chi! Tem!e"a$%"eC m!en#a$ed &Calib"a$edSilic nP"e##%"e Sen# "#The MPX2010/MPXV2010G series siliconpiezoresistive pressure sensors provide a veryaccurate and linear voltage output — directlyproportional to the applied pressure. These sensorshouse a single monolithic silicon die with the straingauge and thin–film resistor network integrated oneach chip. The sensor is laser trimmed for precisespan, offset calibration and temperaturecompensation.Features•Temperature Compensated over 0°C to +85°C•Ratiometric to Supply Voltage•Differential and Gauge OptionsApplication Examples•Respiratory Diagnostics•Air Movement Control•Controllers•Pressure SwitchingFigure 1 shows a block diagram of the internalcircuitry on the stand–alone pressure sensor chip.Figure 1. Temperature Compensated and CalibratedPressure Sensor Schematic+(3(E#( #GE!E"E#))H #F !")E"%E’A)*’EC$"%E#(A) $#A#DCA! B’A) $#C ’C* )’.24+587++587-1G#DVOLTAGE OUTPUT versusAPPLIED DIFFERENTIAL PRESSUREThe output voltage of the differential or gauge sensorincreases with increasing pressure applied to thepressure side (P1) relative to the vacuum side (P2).Similarly, output voltage increases as increasing vacu-um is applied to the vacuum side (P2) relative to thepressure side (P1).Preferreddevices are Motorola recommended choices for future use andbest overall value.Order this documentbyMPX2010/DMOTOROLASEMICONDUCTOR TECHNICAL DATAMotorola, Inc. 2002SMALL OUTLINE PACKAGESURFACE MOUNTUNIBODY PACKAGEMPX2010GPCASE 344BMPX2010GSXCASE 344FPIN NUMBERNOTE:Pin 1 is noted by the notch inthe lead.123Gnd+VoutVS567N/CN/CN/C4–Vout8N/CMPX2010DCASE 344MPX2010DPCASE 344CMPX2010GSCASE 344EMPXV2010DPCASE 1351MPXV2010GPCASE 1369MPX2010MPXV2010GSERIESCOMPENSATEDPRESSURE SENSOR0 to 10 kPa (0 to 1.45 psi)FULL SCALE SPAN: 25 mVMotorola Preferred DevicePIN NUMBER12Gnd+Vout34VS–VoutNOTE:Pin 1 is noted by the notch inthe lead.REV 9Freescale Semiconductor, IFreescale Semiconductor, Inc.For More Information On This Product,Go to: nc...
MPX2010MPXV2010GSERIES2Motorola Sensor Device DataMAXIMUM RATINGS(NOTE)RatingSymbolValueUnitMaximum Pressure (P1 > P2)Pmax75kPaStorage TemperatureTstg–40 to +125°COperating TemperatureTA–40 to +125°CNOTE:Exposure beyond the specified limits may cause permanent damage or degradation to the device.OPERATING CHARACTERISTICS(VS= 10 Vdc, TA= 25°C unless otherwise noted, P1 > P2)CharacteristicSymbolMinTypMaxUnitPressure Range(1)POP0—10kPaSupply Voltage(2)VS—1016VdcSupply CurrentIo—6.0—mAdcFull Scale Span(3)VFSS242526mVOffset(4)Voff–1.0—1.0mVSensitivity∆V/∆P—2.5—mV/kPaLinearity(5)—–1.0—1.0%VFSSPressure Hysteresis(5)(0 to 10 kPa)——±0.1—%VFSSTemperature Hysteresis(5)(–40°C to +125°C)——±0.5—%VFSSTemperature Effect on Full Scale Span(5)TCVFSS–1.0—1.0%VFSSTemperature Effect on Offset(5)TCVoff–1.0—1.0mVInput ImpedanceZin1000—2550ΩOutput ImpedanceZout1400—3000ΩResponse Time(6)(10% to 90%)tR—1.0—msWarm–Up——20—msOffset Stability(7)——±0.5—%VFSSNOTES:1.1.0 kPa (kiloPascal) equals 0.145 psi.
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