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Unformatted text preview: Microscope System with CCD Camera A microscope system is to be configured with a Charge-Coupled Device (CCD) camera for the inspection of Micro-Electro-Mechnical Systems (MEMS) devices. The MEMS devices are square with a side length of L MEMS . For this imaging system, one of two commercial microscopes is to be adapted. The microscope objectives both have Plan engraved on them. This means that the microscope objective has minimal cur- vature of field (i.e. the image field is very flat). This type of objective would be ap- propriate for viewing MEMS devuces or other flat objects. The microscope objectives also have four numbers engraved on them. These are as follows: 1) the transverse lin- ear magnification m o , 2) the numerical aperture NA , 3) the microscope tube length L , and 4) the cover glass thickness t . These particular microscope objectives are metallur- gical objectives for use in air. Thus they are intended to be used without a cover glass and thus t = 0. The microscopes are used with eyepieces that are of the Ramsden type and have their angular magnification...
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- Spring '08