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Unformatted text preview: Inspection System - Microscope Objective and CCD Camera An imaging system is to be configured for the inspection of integrated circuits. The integrated circuits are square with a side length of L ic . For this imaging system, a commercial microscope is to be used. The microscope objective has “Plan” engraved on it. This means that the microscope objective has minimal curvature of field (i.e. the im- age field is very flat). This type of objective would be appropriate for viewing integrated circuits or other flat objects. The microscope objective also has four numbers engraved on it. These are as follows: 1) the transverse linear magnification m o , 2) the numerical aperture NA , 3) the microscope tube length L , and 4) the cover glass thickness t . The particular microscope objective is a metallurgical objective for use in air. Thus it is in- tended to be used without a cover glass and t = 0. The microscope is used with an eye- piece that is of the Ramsden type and has its angular magnification...
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This note was uploaded on 04/29/2008 for the course ECE 4500 taught by Professor Gaylord during the Spring '08 term at Georgia Tech.
- Spring '08
- Integrated Circuit