Lab2 SEM - MAE C187/C287L Nano Lab Scanning Electron...

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MAE C187/C287L Nano Lab Scanning Electron Microscope < Glossary > S.C : Specimen Chamber S.E.C: Specimen Exchange Chamber Vacc : Accelerating Voltage <Thing to make sure before running> 1. Sample Height Adjust the height of specimen so that it’s no higher than the level gauge as shown at right. 2. On Evacuation Control Panel S.C Vacuum lamp : high (green) S.E.C Vacuum lamp: high (green) SC Air Lock Valve : close SEC Valve lamp : close EVAC switch (green) : lit AIR switch : off Free/ Lock lamp : free 3. X,Y,Z, Tilt & Rotation Always make sure followings before loading & unloading the specimen Z -axis : 15 mm X -axis : 12.5 mm (middle value , 0 ~ 25 mm) Y -axis : 12.5 mm (middle value , 0 ~ 25 mm) Tilt & Rotation angle : 0°
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< Operation Procedure : Overview > < Loading the specimen > 1. Press “ AIR ” switch ; Then SEC Vacuum lamp changes High Low Air. Also SEC is opened. 2. Load the sample on the specimen holder. Confirm the sample holder is threaded on the clip. Parameter setting Axis Alignment Astigmatism & Focus Adjustments Imaging if no good Loading the Specimen Unloading the Specimen & Shut Down Vacc Turing-On
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3. Press “ EVAC ” witch while gently pressing the SEC chamber lid. Wait until SEC Vacuum lamp changes Air Low High 4. Open SEC Valve by rotating MV-1 valve from “ C ” to “ O ” position. 5. Gently push the specimen rod into the sample holder in the SC chamber. Separate the rod from the specimen holder by rotating the screw.
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