Lecture_4-Wet_Processing_clean

Lecture_4-Wet_Processing_clean - Lecture 4 Wet Processing...

Info icon This preview shows pages 1–13. Sign up to view the full content.

View Full Document Right Arrow Icon
Wet Processing and Wafer Clean Lecture 4
Image of page 1

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full Document Right Arrow Icon
IH2655 Spring 2008 Mikael Östling KTH Modern IC factories employ a three tiered approach to controlling unwanted impurities: 1. clean factories 2. wafer cleaning 3. gettering
Image of page 2
IH2655 Spring 2008 Mikael Östling KTH Three tiered approach 9 clean room 9 wafer cleaning 9 gettering “Dirt is a natural part of life.”
Image of page 3

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full Document Right Arrow Icon