{[ promptMessage ]}

Bookmark it

{[ promptMessage ]}

Lecture_6_oxidation

Lecture_6_oxidation - Lecture 6 Thermal Oxidation of...

Info iconThis preview shows pages 1–17. Sign up to view the full content.

View Full Document Right Arrow Icon
Thermal Oxidation of Silicon Lecture 6
Background image of page 1

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full Document Right Arrow Icon
IH2655 SPRING 2009 Mikael Östling KTH Thermal oxidation of silicon Applications Properties and fabrication Linear parabolic model Extensions of model Masking properties Defects in SiO 2 Characterization
Background image of page 2