Lecture_6_oxidation - Lecture 6 Thermal Oxidation of...

SCHOOL The City College of New York, CUNY
COURSE TITLE EE 300
TYPE
Notes
UPLOADED BY 626315127_ch
PAGES 68
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Thermal Oxidation of Silicon Lecture 6

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IH2655 SPRING 2009 Mikael Östling KTH Thermal oxidation of silicon Applications Properties and fabrication Linear parabolic model Extensions of model Masking properties Defects in SiO 2 Characterization