Laboratory 2 Report guidelines

Laboratory 2 Report guidelines - fabricate several hundred...

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David Gracias Micro / Nanotechnology Spring 2008 Laboratory 2 Guidelines Laboratory 2 will be held in the Clark Hall Microfabrication facility under the supervision of the manager Huy Vo ( huyvo@bme.jhu.edu ). The link to the Clark Hall facility is http://www.ece.jhu.edu/faculty/andreou/WhitakerFacility/ You HAVE to read the safety manual BEFORE you come to the lab and sign the certification form. You MUST bring this signed form with you in order to do the lab. If you forget to read the lab safety manual don’t bother showing up for lab. Huy will not let you enter. Both safety manual and certification form are posted on Web CT.
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David Gracias Micro / Nanotechnology Spring 2008 1. Using wafer scale microfabrication and conventional photolithography sketch a process flow to
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Unformatted text preview: fabricate several hundred (1 micron x 1 micron x 10 micron) micro magnetic stir bars. 2. Posts on substrates can be used to study interaction of cells with topography, create gecko feet like structures, interconnects etc. Starting with a silicon wafer substrate, draw process flows to fabricate pillars like structures made of copper, by conventional microfabrication. Silicon Substrate a. 100 micron tall x 100 micron wide posts separated by 10 microns b. 100 nm tall x 100 nm wide posts separated by 100 nm c. 3 nm tall x 1 micron wide posts separated by I micron Copper Posts Laboratory 2 Questions...
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Laboratory 2 Report guidelines - fabricate several hundred...

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