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Unformatted text preview: fabricate several hundred (1 micron x 1 micron x 10 micron) micro magnetic stir bars. 2. Posts on substrates can be used to study interaction of cells with topography, create “gecko feet” like structures, interconnects etc. Starting with a silicon wafer substrate, draw process flows to fabricate pillars like structures made of copper, by conventional microfabrication. Silicon Substrate a. 100 micron tall x 100 micron wide posts separated by 10 microns b. 100 nm tall x 100 nm wide posts separated by 100 nm c. 3 nm tall x 1 micron wide posts separated by I micron Copper Posts Laboratory 2 Questions...
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- Spring '09
- Semiconductor device fabrication, Photolithography, Microfabrication, David Gracias Micro, Huy Vo