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Unformatted text preview: ii. Key issues in oxidation d. Role of defects in oxidation V. Diffusion a. Diffusion from an infinite source b. Diffusion from a finite source c. Design of a diffusion process d. Role of defects in diffusion VI. Ion implantation a. Basics of Ion Implantation process b. Ion implantation annealing c. Role of defects in annealing d. Design of ion implantation process VII. Lithography a. Understanding of lithography process i. Contact vs near contact ii. Diffraction issues iii. Standing wave issues b. Nature of photo resist process and potential issues c. Lift off process VIII. Etching a. Understanding of wet chemical etching (HF) b. Understanding of dry etching...
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This note was uploaded on 04/04/2009 for the course ECE 5360 taught by Professor Shealy during the Fall '07 term at Cornell University (Engineering School).
- Fall '07