Sample_schematic_of_fabrication_process

Sample_schematic_of_fabrication_process -...

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Dry etch 2-8 μ m holes in Si 3 N 4 KOH etch through Si CVD deposit Si
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This note was uploaded on 04/04/2009 for the course ECE 5360 taught by Professor Shealy during the Fall '07 term at Cornell University (Engineering School).

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