ECE5360_Lab_1 - ECE 5360, Fall 2008 Lab Session 1 Lab...

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ECE 5360, Fall 2008 Lab Session 1 Pre-lab: Complete the Reading Assignment especially materials in chapter 3 of your text on the 4 point probe technique which appears in Section 3.4.1.2 on page 113. In Lab: 1. 4” Si Wafer Distribution and Labeling: Obtain a 4” diameter silicon substrate (001) of either n-type or p-type conductivity from the TA. One wafer per student. a. Substrate Identification: The n-type and p-type substrates can be distinguished by the positioning of the wafer flats as shown in Figure 2. Using a diamond scribe tool provided by the TA, gently scribe (scratch) your name and wafer type on the bottom flat of the substrate as shown. The major flat is the longer of the 2 flats as indicated. Figure 2. Diagram of the 4” Si substrates to be processed. The ”x”s mark the spots where 4 point probe measurements are to be taken. b. Manufacturers Data: Obtain the resistivity and thickness specs on this substrate from the TA. Note any other data provided by the manufacturer.
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2. Substrate Resistivity Measurement - 4 Point Probe Note that the spacing ”s” on the ”57” probes is 1 mm. a. Set Up of the Instrument:
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This note was uploaded on 04/04/2009 for the course ECE 5360 taught by Professor Shealy during the Fall '07 term at Cornell University (Engineering School).

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ECE5360_Lab_1 - ECE 5360, Fall 2008 Lab Session 1 Lab...

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