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Unformatted text preview: .Your field oxidation process is carried out in the CNF using a furnace tube at 1 atm pressure of wet oxide (steam) at 1100C . Using the Deal Grove Model and the following expressions for the rate constant plot the oxide thickness versus time for periods up to 2 hours oln set 3 i=0; % initial oxide =0:.01:2; %Time in seconds 1=3.86*10^2; %B constant 1=.78; %B activation energy 2=1.63*10^8; %B/A constant 2=2.05; %B/A activation energy T=8.617*10^-5*(1100+273); =C1*exp(-E1/kT); %B oA=C2*exp(-E2/kT); %B/A =(BoA^2/B)^-1; s=A^2; au=xi^2/B+xi/BoA; =A/2*(sqrt(1+(T*4*B/As))-1); lot(T,X); label('Time in hours'); label('Thickness in microns'); nd C lic k t o b u y N O W ! P D F-X Ch an g e w w w .d o cu-tr ac k .c o m C lic k t o b u y N O W ! P D F-X Ch an g e w w w .d o cu-tr ac k .c o m .) Your gate oxidation process is carried out in the CNF a 1atm pressure of dry oxide calculate the thickness of the oxide for periods up to 2 hours. ame program as above ifferent activation nergies and prefactors...
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This note was uploaded on 04/04/2009 for the course ECE 5360 taught by Professor Shealy during the Fall '07 term at Cornell.
- Fall '07