Appendix_B - APPENDIX B Scanner Qualications Certication of an AFM scanner to assure that it meets specications requires that several tests be made

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Scanner Qualifcations APPENDIX B 140 Certifcation oF an A±M scanner to assure that it meets specifcations requires that several tests be made. Tis document o²ers the test protocol used For assuring that a scanner meets its specifcations. An example oF a specifcation and pass criteria is presented in the Following table: # Name oF Test Pass Criteria 1 Scan Range Z-Range > 80µm >8 µm 2 X-Calibration Check Y-Calibration Check Z-Calibration Check 2.99 ± 0.02 µm 2.99 ± 0.02 µm 19.5 ± 0.8 µm 3 Non-Linearity: X Over Full Range Y Over Full Range Z Over Full Range < 1% < 1% < 1% 4 Non-Orthogonality: XY ZX ZY < 1% < 1% < 1% 5 Noise Level: Z actuator Z sensor < 0.08 nm, rms < 0.20 nm, rms All measurements are made in vibrating mode with the stage on a vibration table and in an acoustic enclosure. Samples and supplies required to certiFy the scanner are: Samples required: 1. VLSI S³R10-180P, pitch = 10.0 µm 2. VLSI S³S3-180P, pitch = 2.99 ´ 0.02 µm 3. N³-MD³, ³GG01, triangle, pitch = 3.0 µm
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141 Appendix B • Scanner Qualif cations X-Line Profile: Flat Sample Holder 7 Deg Sample Holder XY Scan Range Take a scan of the VLSI 3 micron pitch sample at max scan range with PID optimized. Save the image. Level it properly, extract the line proF le along X&Y, and count the number of features over the range. It should be greater than 27. Example: # of X-pitches = 28 # of Y-pitches = 28 Sample holder: standard fl at sample holder, sample holder with 7 degree tilt Software: NanoRule+, Excel TM .
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Appendix B • Scanner Qualif cations 142 Y-Line Profile: Z-range Measure standard VLSI sample with known step size on a standard sample holder . Replace the sample holder with an inclined one. Position it with
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This note was uploaded on 04/09/2009 for the course MSE 111 taught by Professor Giannelis during the Fall '07 term at Cornell University (Engineering School).

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Appendix_B - APPENDIX B Scanner Qualications Certication of an AFM scanner to assure that it meets specications requires that several tests be made

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