EE 438 HW1 SOLNS

# EE 438 HW1 SOLNS - 2Lo 9 EE-438H W#1 O xidation Solution...

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Unformatted text preview: 2Lo 9 EE-438H W#1: O xidation Solution: Part (a) '5vc)l'*f fi\-a Yang Wang B = C ', e x\.-la 'o / p\ k r) I Cr = 7.72.1o'1t'hr-' 4 = I -23eV + B=(l n.ror)..n[ r.23 k=B5I7.to-s{ K Z = 1 060+273=1333K (a.orz.ro O.0l726lt2hr-l * {-#) f = c,1roo; .B tA= Ez= 2 .0eV 6 .23.106 ( ') z .o k=8.617-to'+,7 1333K = B = 0 .Ol7261t2hr-l =+A= # =o.t7sott A ttnA=-f, x? Ax' + xi = 250A=O.O25W) o.o2s2+a(o.ozs)l ll* -o.*-=_ - ---_--;-l lr u l) t "rt-=0.2897hr A= O .l750tt, = 0 .Ol726lt2hr-r B B = O.Ol7261t2hr-l A= O . I 7 5 o tt To.ut4^= .2897hr O = 4 t = 7.092hr 7hr5min Part (b) B = C', e x\p a I ' - lk r ) Cr=2.14'10'1t'hr-t Er=O'7IeV k=B.6t7.Io-5{ K = 1 060+2 73= 1 333K I ( p\ o3t + B = (z.t+r o,)".n[o .*rrp'h,-' 1 (s.orz.orXt333) )= |=c,gm1"-{-h) t t'hr-'l c"(roo)c,(ttt) - 8.ss'107 E-,'=z.'.osrv{3 {3 , 8 .9s.r0, ( z .os ) I7O1t.hra f *t=-T-"^t-GtL0-)(1333)j= k = 8 .617. o-t{ . T = 1 333K t K' B = 0 .44251t'hr-' + A =#=o.a8zep =o * *: L l h.*H_ , )=2 BooA'Tl], ' : + [.,/' T t l= " ooo B = O .44251t'hr-t A = O .4826F t = Ofor wet oxidation Part ( c) Samea s p art ( a), I n = o.otl26u2hr-l I I (_ (_') A .) I - o A825hremin =Z / lA=o.r7s0U h lT*u^rn= o .2897 r t-PrHr*uns- x2ernuirtns*fuprn"rNtirrs] B l +Tr*uN,ins= ) o.z'+e(o.4) x pre-aistins=2AA0A = O-ZW BI + = Tpre-existns 4'345 hr A= O .l710trt, = 0 .012261f r-l B h ,^=+l Part (d) lt B = O .Ol726pt2hr-t = O .1750F,T **r,n= O .2gg7 r, T ,A h 4 p ,oo,"h,s=.345hr I=t=I358hr=t3hr35mi Accordingt o P 10i n t he slides( Thermal Oxidationo f S ilicon), the d istance elow t he b original S ilicons urface = 4 800Ax Q \$o/s = 2L6OA ...
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## This note was uploaded on 04/11/2009 for the course EE 438L taught by Professor Kaviani during the Spring '09 term at USC.

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EE 438 HW1 SOLNS - 2Lo 9 EE-438H W#1 O xidation Solution...

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