Week-7-2-thin-film-I

Week-7-2-thin-film-I - EE-438L:Introduction to...

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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 1 EE-438L :Introduction to Microelectronic Processing Dr. Kian Kaviani University of Southern California Viterbi School of Engineering Ming Hsieh Electrical Engineering Dept.
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 2 Thin Films in IC Industry
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 3 Various Techniques for Thin Film Formation There are three general techniques that can be used to form thin films : 1. Film – growth by interaction of a vapor deposited species with the substrate 2. Film – formation by deposition without causing changes to the substrate material. 3. Coating of the substrate with a liquid, which is then dried to form the solid thin – film.
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 4 Thin Film Deposition Group – 1: Thermal Oxidation Thermal Nitridation Silicide Formation Group – 2: Chemical Vapor Deposition (CVD) Physical Vapor Deposition (PVD) Electroplating Group – 3: Spin – on deposition
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 5 Group – 1
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 6 Group – 2 : CVD
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 7 Group – 2 : PVD
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 8 Group – 2 : PVD : Sputtering
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 9 Group – 2 : PVD : Cluster Systems
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 10 Group – 2 : Electroplating
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10/06/09 Dr. Kian Kaviani Spring- 2008:EE4 11 Group – 3 : Spin – On Liquids
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Week-7-2-thin-film-I - EE-438L:Introduction to...

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