Week-11-CMOS2

Week-11-CMOS2 - EE 504L CMOS Processing Dr. Kian Kaviani...

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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 1 EE – 504L CMOS Processing Dr. Kian Kaviani Ming Hsieh Electrical Engineering Dept. University of Southern California, Viterbi School of Engineering
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 2 Basic Concept in CMOS
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 3 3-D View of a CMOS
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 4 Step – 1: Choice of Substrate
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 5 SiN Deposition Mask - 1
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 6 Step – 4: Channel Stop Implant
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 7 Step – 5: Formation of LOCOS Loc al O xidation of S ilicon
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 8 Step – 5: Formation of LOCOS
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 9 P–Well Formation & Mask– 2
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 10 N–Well Formation & Mask– 3
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10/06/09 Dr. Kian Kaviani - Spring 2009 EE5 11 Step–10: Drive–in & Formation of n&p Tubs
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This note was uploaded on 04/11/2009 for the course EE 438L taught by Professor Kaviani during the Spring '09 term at USC.

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Week-11-CMOS2 - EE 504L CMOS Processing Dr. Kian Kaviani...

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