full_lab_version_Spring_2009_1

full_lab_version_Spring_2009_1 - EE-438L LabSpring 2009Dear...

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Unformatted text preview: EE-438L LabSpring 2009Dear students,In spring 2009 you will participate in eleven lab sessions, each of which 3hours, in 11 consecutive weeks starting on Monday 01/29/2009. The 12thsession is an open session.The grading system is based on the following criteria:1.Attendance and punctuality (100 points, 5% of final grade):You can earn up to 100 points, 10 points in each lab session, for attendance and being on time.You will loose 1/2point for each minute of tardiness, up to a maximum of 5 points in each session. 2.Being prepared (100 points, 5% of final grade):You can earn up to 100 points, 10 points in each lab session, for being prepared to answer TA's questions about the procedures in the current session.3.Work habit (100 points, 5% of final grade):You can earn up to 100 points, 10 points in each lab session, for your work habit.4.Quizzes (100 points, 5% of final grade):4 quizzes are taken in 4th, 6th, 8th, and 10thsessions.You can earn up to 100 points, 25 points for each of 4 quizzes. In each quiz you will be answering questions about the experimental procedures in the two lab sessions before that quiz. 1Experimental ProceduresEquipment:1. FurnaceBrand name: Thermco Products CorporationModel: Serial # MB-712. ProfilometerBrand name: Tencor InstrumentsModel: Alpha-Step 2003. MicroscopeBrand name: NikonModel: Optiphot4. MicroscopeBrand name: Leitz WetzlarModel: EN-307397-B5. Hot PlateBrand name: Cost Effective EquipmentModel: 20006. Photoresist SpinnerBrand name: Head Way Research Inc.Model: I-ECIOID-R4857. Photoresist SpinnerBrand name: Laurell Technologies CorporationModel: WS-200-4NPP8. AlignerBrand name: Quinutel Corporation9. AlignerBrand name: Karl Sss10. AlignerBrand name: Casper11. Plasma Asher Brand name: Tegal CorporationModel: 415 Plasmaline212. Microwave Asher Brand name: Plasmatic Systems13. Vacuum EvaporatorBrand name: CHA IndustriesModel: SE-1000-RAPChemicals:1. BOEEtchant 7:1Brand name: General ChemicalComposition: Ammonium Fluoride (40%) - 7 partsHydrofluoric Acid (49%) - 1 part2. Tri Chloro Ethylene CMOSBrand name: J.T. BakerComposition: ClCH, CCl23. AlfaAESARBrand name: Johnson MattheyComposition: Aluminum Shot, 4-8mm (0.2-0.3inch), 99.99% (metal basis)4. Phosphosilica FilmBrand name: Emulsitone Co.Composition: Methanol 3-5% CAS No. 67-56-1Ethyl Alcohol 70-80% CAS No. 64-17-55. AZ5214-E IR PHOTORESISTBrand name: Clariant CorporationComposition:1-Methoxy-2-Propanol Acetate (108-65-6)Cresol Novolak Resin (117520-84-0)Diazonaphthoquinonesulfonic Ester (67829000004-500lP)Phenolic Compound (67829000004-5003P)6. Acetone CMOSBrand name: J.T. BakerComposition: (CH3) 2COFW58.08Flash point: -20C (-4 F) (Closed cup) CAS No. 67-64-17. AZ400K Developer Diluted 1:4Brand name: Clariant Corporation3Composition: Potassium borates (20786-60-1)Water8. Microprime HP-PrimerBrand name: ShinEtsu Micro Si (Micro Electronic Materials)Composition: HMDS (Hexamethyl- disilazane)9. Methanol CMOSBrand name: J.T. BakerBrand name: J....
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full_lab_version_Spring_2009_1 - EE-438L LabSpring 2009Dear...

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