Lecture02_Passives_2up

Lecture02_Passives_2up - EECS240 Spring 2008 Lecture 2:...

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EECS240 – Spring 2008 Lecture 2: CMOS Technology and Passive Devices Elad Alon Dept. of EECS EECS240 Lecture 2 2 Today’s Lecture CMOS cross-section Passive devices Resistors Capacitors (Inductors) Next time: MOS transistor
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EECS240 Lecture 2 3 CMOS Process EECS240 0.18 µ m 1P6M CMOS Minimum channel length: 0.18 µ m 1 level of polysilicon 6 levels of metal (Cu) 1.8V supply Other choices Shorter channel length (65nm / 1V) Bipolar, SiGe HBT SOI EECS240 Lecture 2 4 CMOS Cross Section Metal Poly p - substrate n - well p + diffusion n + diffusion
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EECS240 Lecture 2 5 Dimensions 700 µ m 3nm 0.18 µ m 0.6 µ m 100nm Drawing is not to scale! EECS240 Lecture 2 6 Devices Active NMOS, PMOS Vertical PNP Diodes Options (e.g. BiCMOS) Passive Resistors Capacitors Inductors
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EECS240 Lecture 2 7 Resistors No provisions in standard CMOS Resistors are bad for digital circuits Æ Minimized in standard CMOS Sheet resistance of available layers: 60 m / ± 5 / ± 5 / ± 1 k / ± Aluminum Polysilicon N+/P+ diffusion N-well Sheet resistance Layer EECS240 Lecture 2 8 How about an N-Well Resistor?
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EECS240 Lecture 2 9 Process Options Available for many processes Add features to “baseline process” E.g. Silicide block option “High voltage” devices (2.5V & 3.3V, >10V) Low V TH devices Capacitor option (2 level poly, MIM) EECS240 Lecture 2 10 Silicide Block Option Non-silicided layers have significantly larger sheet resistance Resistor nonidealities: Temperature coefficient: R = f(T) Voltage coefficient: R = f(V) as 50 50 -500 -500 30,000 50 50 500 500 20,000 -800 200 1500 1600 -1500 100 180 50 100 1000 N+ poly P+ poly N+ diffusion P+ diffusion N-well B C [ppm/V] V C [ppm/V] T C [ppm/ o C] @ T = 25 o C R/ ± [ / ± ] Layer
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EECS240 Lecture 2 11 Resistor Example Goal : R = 100 k , T C = 1/R x dR/dT = 0 Example Solution : N+ and P+ poly resistors in series () squares 4 . 444 k 80 1 1 squares 200 k 20 1 1 1 1 0 = = = = = = + + + = + + + = CN CP P CP CN N CP P CN N R P N CP P CN N T T R R T T R R T T R T R R R T T R T T R R
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This note was uploaded on 05/23/2008 for the course EECS 240 taught by Professor Eladalon during the Spring '08 term at University of Calgary.

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Lecture02_Passives_2up - EECS240 Spring 2008 Lecture 2:...

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