W7_Nanotech - Nanotribology of MEMS/NEMS and BioMEMS/NEMS Materials Prof Bharat Bhushan Ohio Eminent Scholar and Howard D Winbigler Professor and

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Nanotribology of MEMS/NEMS and BioMEMS/NEMS Materials Prof. Bharat Bhushan Ohio Eminent Scholar and Howard D. Winbigler Professor and Director NLIM [email protected] Nanotribology Laboratory for Information Storage and MEMS/NEMS
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Outline Background Definition of MEMS/NEMS and characteristic dimensions Examples of MEMS/NEMS and BioMEMS/NEMS with tribological issues Experimental - AFM Tribological studies of lubricant films self-assembled monolayers perfluoropolyethers Bioadhesion Studies Morphological changes and adhesion of biomolecules on Si based surfaces Surface modification approaches to improve bioadhesion Friction and Wear
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Characteristic dimensions in perspective Background
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Examples of MEMS with tribological issues
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Microgear unit, which can be driven at speeds up to 250,000 RPM.
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Examples of commercial MEMS devices with tribological issues
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Probe based NEMS data storage Examples of NEMS with tribological issues
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Examples of BioMEMS/NEMS with tribological issues
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Tribological issues during device operation
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The tribological problems can drastically compromise device
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This note was uploaded on 07/17/2008 for the course CHEM 694 taught by Professor Dr.coe during the Spring '05 term at Ohio State.

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W7_Nanotech - Nanotribology of MEMS/NEMS and BioMEMS/NEMS Materials Prof Bharat Bhushan Ohio Eminent Scholar and Howard D Winbigler Professor and

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