P287_Datasheet - Piezo Nano Positioning P-287 Z/Tilt...

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2-47 Z/Tilt Piezoelectric Flexure Stage P-287 The P-287 is a high-resolution, piezoelectrically driven flexure stage providing tilt up to 12 mrad and vertical travel up to 700 μm at the tip. A ball seat is machined into the tip to decou- ple any rotation if the P-287 is used as a linear drive. In that case an external guiding sys- tem is recommended (e.g. fric- tionless diaphragm spring). Working Principle P-287 positioners are equipped with high-voltage piezoelectric drives (0 to -1000 V) integrated into a zero stiction/friction, ul- tra-high-resolution, wire-EDM- cut flexure motion amplifier system. The linear motion of the piezo translator produces an arc motion of the tip. P-287.70 piezo nanopositioning / scanning stage Application Examples Wafer inspection Nanopositioning Medical analysis Biology Optics * For further information see p. 2-8. Resolution of PI piezo nanopositioners is not limited by friction or stiction. The value given is noise equivalent motion with E-507 amplifier.
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  • Spring '14
  • Piezoelectricity, Tilt Piezo Flexure

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