This preview shows pages 1–2. Sign up to view the full content.
This preview has intentionally blurred sections. Sign up to view the full version.View Full Document
Unformatted text preview: connected to the substrate. 3) Use L-Edit to create a layout of the wheel in the PolyMUMPS process. Be sure to follow the design rules in the MUMPS handbook. EE 215 Spring 06 Homework #2 4) Liu problem 3.23 5) Liu problem 3.24 6) Liu problem 4.1 7) Liu problem 4.4 8) Liu problem 4.6 (assume the conditions of problem 4.4 rather than 4.6). You can assume the area of the fixed bottom plate of the capacitor is the same as the area of the released top plate of the capacitor and you can ignore fringing fields. 9) Liu problem 4.9 (ignore the proof mass on the end of the cantilever and assume a uniform load w per unit length). 10) Dmitry-Senturia 8.5 11) Dmitry-Senturia 10.1...
View Full Document
This note was uploaded on 11/21/2008 for the course EE 215 taught by Professor Joelkubby during the Fall '05 term at University of California, Santa Cruz.
- Fall '05