Homework 2 - connected to the substrate 3 Use L-Edit to create a layout of the wheel in the PolyMUMPS process Be sure to follow the design rules in

Info iconThis preview shows pages 1–2. Sign up to view the full content.

View Full Document Right Arrow Icon
EE 215 Spring 06 Homework #2 1) Use L-Edit to spell out your name in poly0. An example of my name is shown below: Once you have spelled out your name, make a 100x100 array of your name. An example using my name is shown below: 2) Using the minimum combinations of deposited oxide and polysilicon films, create a mask set and surface micromachining process flow that will produce a wheel that can rotate freely about a hub that extends over the top of the wheel. A rough sketch is shown below. Both features are made of polysilicon. Shading is used to distinguish the hub from the rotor, which is free to rotate. It is also free to fall down to touch the substrate, but is shown lifted to emphasize that it is not
Background image of page 1

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
Background image of page 2
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: connected to the substrate. 3) Use L-Edit to create a layout of the wheel in the PolyMUMPS process. Be sure to follow the design rules in the MUMPS handbook. EE 215 Spring 06 Homework #2 4) Liu problem 3.23 5) Liu problem 3.24 6) Liu problem 4.1 7) Liu problem 4.4 8) Liu problem 4.6 (assume the conditions of problem 4.4 rather than 4.6). You can assume the area of the fixed bottom plate of the capacitor is the same as the area of the released top plate of the capacitor and you can ignore fringing fields. 9) Liu problem 4.9 (ignore the proof mass on the end of the cantilever and assume a uniform load w per unit length). 10) Dmitry-Senturia 8.5 11) Dmitry-Senturia 10.1...
View Full Document

This note was uploaded on 11/21/2008 for the course EE 215 taught by Professor Joelkubby during the Fall '05 term at University of California, Santa Cruz.

Page1 / 2

Homework 2 - connected to the substrate 3 Use L-Edit to create a layout of the wheel in the PolyMUMPS process Be sure to follow the design rules in

This preview shows document pages 1 - 2. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online