CR-437-2009-mid - National Institute of Technology Rourkela...

Info icon This preview shows page 1. Sign up to view the full content.

View Full Document Right Arrow Icon
Image of page 1
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: National Institute of Technology, Rourkela - 769008 Department of Ceramic Engineering Mid Semester Examination, 2009 Session: 2008—09 Spring Semester B. Tech 3‘" Semester Subject: Thin Film and Coating Department Code CR - A 3? Full Marks: 60 Duration of Examination: 2 Hours Answer All Questions Figures at the right hand margin indicate marks All parts of a question should be answered at one place Please do not write history, Answer briefly and to the point or else you will not be able to answer the required questions 1 Discuss the working principles of the following pumps 15 (i) Diffussicn Pump (ii) Turbo molecular pump 2 What are the different types of reaction mechanism involved in CVD process? 5 + 5 +5 Explain with proper examples How low pressure CVD and plasma enhanced CVD process can be carried out? 3 How diffusion and viscous flow control the film growth in CVD process? 10 4 Discuss different factors which controi growth rate uniformity? 10 5 A chamber is evacuated by two sorption pumps of identical pumping speed. In 10 one configuration the pumps are attached in parallel so that both pump simultaneously. In the second configuration they pump in serial or sequential order (one on and one oft). Comment on the system pumping characteristics (pressure vs. time) for both configurations. ...
View Full Document

{[ snackBarMessage ]}

What students are saying

  • Left Quote Icon

    As a current student on this bumpy collegiate pathway, I stumbled upon Course Hero, where I can find study resources for nearly all my courses, get online help from tutors 24/7, and even share my old projects, papers, and lecture notes with other students.

    Student Picture

    Kiran Temple University Fox School of Business ‘17, Course Hero Intern

  • Left Quote Icon

    I cannot even describe how much Course Hero helped me this summer. It’s truly become something I can always rely on and help me. In the end, I was not only able to survive summer classes, but I was able to thrive thanks to Course Hero.

    Student Picture

    Dana University of Pennsylvania ‘17, Course Hero Intern

  • Left Quote Icon

    The ability to access any university’s resources through Course Hero proved invaluable in my case. I was behind on Tulane coursework and actually used UCLA’s materials to help me move forward and get everything together on time.

    Student Picture

    Jill Tulane University ‘16, Course Hero Intern