RF-Switch-Springer.pdf - Microsyst Technol DOI...

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1 3 Microsyst Technol DOI 10.1007/s00542-017-3403-z TECHNICAL PAPER Design and performance analysis of uniform meander structured RF MEMS capacitive shunt switch along with perforations Akshay Kumar Ravirala 1 · Leela Koteswari Bethapudi 1 · Jeevani Kommareddy 1 · Bhanu Sai Thommandru 1 · Sateesh Jasti 1 · Prakash Raju Gorantla 1 · Ashok Puli 1 · Girija Sravani Karumuri 1 · Srinivasa Rao Karumuri 1 Received: 20 March 2017 / Accepted: 29 March 2017 © Springer-Verlag Berlin Heidelberg 2017 1 Introduction Radio Frequency Micro Electro Mechanical Systems is an innovative and the recently emerging technology especially in the design of switching devices (Rebeiz et al. 2003 ). The name itself indicates that it has an interdisciplinary nature. The size of the device varies between 1 and 100 micro- metres. MEMS devices combine the advantages and over- come the disadvantages of electro-mechanical switches like coaxial, waveguide switches and semiconductor switches such as PIN diodes, FETs (Molaei and Ganji 2016 ). As the component size is in the order of the microns, it facilitates many advantages like less consumption of power, low cost, linearity, low operating voltage, high isolation, high relia- bility, less insertion loss and moreover it provides an oppor- tunity to fabricate in large arrays (He et al. 2011 ). As it has fabulous characteristics, it could be used in many applica- tions like Smart Mobile device, Antennas, Space systems, Bluetooth, T/R modules, Communication. Mainly RF MEMS switches are designed for microwave applications like cell phone, short range communications like Bluetooth and WLAN, automotive industries. These devices were employed in RF, i.e., from 30 KHz to 300 GHz with dif- ferent and WLAN, automotive industries. These devices were employed in RF, i.e., from 30 KHz to 300 GHz with different geometrical structures and characteristics like low insertion loss and high isolation (Angira et al. 2014 ). In a short time ago many RF MEMS capacitive shunt switches have been designed and fabricated by introduc- ing different technologies; in this paper we are presenting the design and simulations of the capacitive shunt switch which is a ff xed-ff xed structure in FEM Tool. In order to increase the performance of switching of the ff xed-ff xed structure some modiff cations are done to the structure; the modiff cations include the addition of meander, perforations Abstract This paper presents design and simulation of uniform structured RF MEMS capacitive shunt switch using FEM tool and HFSS software. The switches with different shaped meanders and perforations which result in less spring constant, less pull-in voltage, high isolation loss, high switching speed and low insertion loss have been designed. From the simulated results it is observed that the rectangular perforations gives the better results, when compared with square and cylindrical shaped perforations.
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  • Fall '16
  • SANDEEP
  • Permittivity, Microsyst Technol, movable beam, square meander

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