Unformatted text preview: 3. Given an ntype ionimplanted layer with thickness t = 1 μ m and average doping concentration N d = 10 17 cm3 . a) What is the sheet resistance? b) What is the resistance of the layout shown below? (Assume that the contact regions each contribute 0.65 squares.) c) By adding additional dopants, we make a new ntype ionimplanted resistor with an average doping concentration N d 1 = 2x10 17 cm3 over the depth 0 < x < 0.25 μ m and N d 2 = 10 17 cm3 over the depth 0.25 μ m < x < 1 μ m. Find the new sheet resistance....
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This note was uploaded on 04/01/2008 for the course EECS 105 taught by Professor Mingwu during the Spring '06 term at Berkeley.
 Spring '06
 MingWu
 Computer Science, Electrical Engineering

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