2-21-06 systematic mechanisms limited yield survey

2-21-06 systematic mechanisms limited yield survey -...

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Unformatted text preview: 2/23/06 RCL- SMLY Presentation 1 Systematic Mechanisms Systematic Mechanisms Limited Yield Survey Limited Yield Survey Rob Leachman IEOR 130 U C Berkeley 21 February, 2006 2/23/06 RCL- SMLY Presentation 2 Background Assess performance and practices at 5 Sematech member companies in systematic mechanisms limited yield (SMLY) improvement Identify BKMs and make recommendations for realizing better practices Study initiated March, 2002 Final report issued March, 2003 2/23/06 RCL- SMLY Presentation 3 Agenda Overall yield loss trends Top-down decomposition of overall yield loss into defect and systematic losses Prevalent systematic losses Best practice: bottom-up analysis of component losses Recommendations 2/23/06 RCL- SMLY Presentation 4 Overall yield loss trends Die yields reported by participants were normalized for die area We assumed half of yield losses arise from systematic mechanisms and half arise from Poisson-distributed random defects: Y = Ys*Yr = Ys*exp(-AD ) = [(1+Y)/2]*exp(-AD ) We solved for D using given die area A and given die yield Y. Then we predicted die yield for A = 0.5 sq cm: DY = [(1+Y)/2]*exp(-0.5*D ) We graphed Yield loss = 1 - DY*SLY where SLY is the reported sort line yield For this assumption, the yield loss curves of the participants line up remarkably well 2/23/06 RCL- SMLY Presentation 5 Figure 2 350 nm Yield Loss Curves 0.1 1 S e p- 9 6 J a n- 9 7 M a y- 9 7 S e p- 9 7 J a n- 9 8 M a y- 9 8 S e p- 9 8 J a n- 9 9 M a y- 9 9 S e p- 9 9 J a n- M a y- S e p- J a n- 1 M a y- 1 S e p- 1 J a n- 2 M a y- 2 S e p- 2 1 - Die Yield (A=0.5)*Sort Line Yield 2/23/06 RCL- SMLY Presentation 6 Figure 3 250 nm Yield Loss Curves 0.1 1 A p r- 9 8 J u l- 9 8 O c t- 9 8 J a n- 9 9 A p r- 9 9 J u l- 9 9 O c t- 9 9 J a n- A p r- J u l- O c t- J a n- 1 A p r- 1 J u l- 1 O c t- 1 J a n- 2 A p r- 2 J u l- 2 O c t- 2 1 - Die Yield (A=0.5)*Sort Line Yield 2/23/06 RCL- SMLY Presentation 7 Figure 4 180 nm Yield Loss Curves 0.1 1 S e p- N o v- J a n- 1 M a r- 1 M a y- 1 J u l- 1 S e p- 1 N o v- 1 J a n- 2 M a r- 2 M a y- 2 J u l- 2 S e p- 2 N o v- 2 1 - Die Yield (A=0.5)*Sort Line Yield 2/23/06 RCL- SMLY Presentation 8 The yield learning rate improved at the 180nm node Technology Rate of Reduction in Yield Loss...
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This note was uploaded on 04/02/2008 for the course IEOR 130 taught by Professor Leachman during the Spring '07 term at University of California, Berkeley.

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2-21-06 systematic mechanisms limited yield survey -...

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