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Complete2 - Transducer Basics Agenda Energy Domains...

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1 Lecture 2 EEL 5225, Fall 2009, H. Xie Transducer Basics book Senturia, Ch. 2 filetalltext3 HW1 head2right Agenda boxshadowdwn Energy Domains & Transduction Mechanisms boxshadowdwn Transducer Specifications boxshadowdwn MEMS Transducer Design Methodology
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2 Lecture 2 EEL 5225, Fall 2009, H. Xie Classification square4 Transducer square4 Element that converts one form of energy to another. square4 May include square4 sensors (for measurement) square4 actuators (for doing work) square4 Microsensor or microactuator square4 a sensor or actuator that is manufactured using microfabrication and/or micromachining techniques square4 Other microstructures that neither sense nor actuate. square4 Microchannels square4 Micronozzles square4 Microlenses, etc.
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3 Lecture 2 EEL 5225, Fall 2009, H. Xie Transduction Mechanisms Ref. Smith, R.L. “Sensors”, The Electrical Engineering Handbook, Boca Raton, CRC Press LLC, 2000
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4 Lecture 2 EEL 5225, Fall 2009, H. Xie Transduction Mechanisms Mechanical Piezoelectric Piezoresistive , Resistive, Capacitive, and Inductive effects Electrical Piezoresistive pressure sensor • IMG at University of Florida Nitride Membrane ( 1 μ m ) Piezoresistors Cavity
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5 Lecture 2 EEL 5225, Fall 2009, H. Xie Transduction Mechanisms Electrical Thermal Joule heating , Peltier effect OK, so a resister gets hotelipsis. elipsis but we can use this thermal energy for actuation.
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6 Lecture 2 EEL 5225, Fall 2009, H. Xie Transduction Mechanisms Thermal Thermal expansion , radiometer effect Mechanical • Prof. Xie (IMG) at University of Florida oxide silicon substrate metal poly-Si silicon mirror Bimorph actuator x z bimorph actuator mirror mirror bimorph actuators 1mm frame Thermally actuated micromirrors
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7 Lecture 2 EEL 5225, Fall 2009, H. Xie Transducer Specifications Definitions: p(t) = physical variable x(t) = sensor excitation y(t) = sensor response p meas (t) = measured variable Sensor Interface Circuit Data System p(t) y(t) x(t) p meas.
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