Fabcomplete - Fabrication Technology Part I Agenda...

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1 Lecture 3 EEL 5225, Fall 2009, H. Xie Fabrication Technology, Part I b Senturia, Ch. 3, pp. 29-37, 42-47 f h Agenda B Microfabrication – Overview B Layer Deposition
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2 Lecture 3 EEL 5225, Fall 2009, H. Xie Basic Semiconductor Devices s P/N diode s Bipolar junction transistor (BJT) s N/P/N s P/N/P s Metal-oxide-semiconductor field-effect transistor (MOSFET) s n-channel (NMOS) s p-channel (PMOS) s complementary MOS (CMOS) Idealized pictures P N P N N P N N Metal (Al) Poly Si SiO 2
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3 Lecture 3 EEL 5225, Fall 2009, H. Xie s Diode P N Metal (Al) N P+ Planar Process N+ Basic Semiconductor Devices s CMOS Johns and Martin, Analog Integrated Circuit Design
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4 Lecture 3 EEL 5225, Fall 2009, H. Xie Materials Classification s By Class: s Metals Cu, Al, Ta, alloys s Ceramics oxides, nitrides, carbides, glass s Polymers photoresist, plastics, liquid crystals s Semiconductors Si, Ge, GaAs, InSb s Composites particulate composites, laminates, etc. s By Property: s Mechanical modulus, ductile, brittle, fatigue, ± s Electrical conductors, dielectrics, semiconductor± s Magnetic ferromag., paramag., magnetostrictive± s Optical refractive index, absorption± s Chemical oxidation states,
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5 Lecture 3 EEL 5225, Fall 2009, H. Xie Crystallinity Amorphous Polycrystalline Domains Domain walls Crystalline Ex: Si, GaAs Ex: Poly Si, metals Ex: thermal oxide, polymers
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6 Lecture 3 EEL 5225, Fall 2009, H. Xie Amorphous SiO 2 Dielectric Crystalline Si Channel Poly-Crystalline Si Gate Electrode Crystallinity Ref: Jaeger, Intro to Microelectronic Fabrication , p.39. High-resolution transmission electron microscope image s MOS Gate
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7 Lecture 3 EEL 5225, Fall 2009, H. Xie Crystallography Diamond structure Group IV Materials (Si) Ref: S. A. Campbell, The Science and Engineering of Microelectronic Fabrication , 2001, pp. 15, 16. Lattice Unit Cell
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8 Lecture 3 EEL 5225, Fall 2009, H. Xie Miller Indices Notation for Miller indices (ijk): a specific crystal plane or face {ijk}: a family of equivalent planes [ijk]: a specific direction which is normal to the (ijk) plane <ijk>: a family of equivalent directions To find the miller index of a plane: Step 1: Find points where plane crosses x,y,z coordinate axes Step 2: Take inverse Step 3: Multiply by smallest factor to make indexes integers Ref: Senturia, Microsystem Design, pg. 31
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9 Lecture 3 EEL 5225, Fall 2009, H. Xie Substrate Materials: Silicon
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Fabcomplete - Fabrication Technology Part I Agenda...

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