Handouts2 - Basic Semiconductor Devices P/N diode Idealized pictures Fabrication Technology Part I Agenda Microfabrication Overview Layer

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1 Handout 3 EEL 5225, Fall 2009, H. Xie Fabrication Technology, Part I b Senturia, Ch. 3, pp. 29-37, 42-47 f h Agenda B Microfabrication – Overview B Layer Deposition 2 Handout 3 EEL 5225, Fall 2009, H. Xie Basic Semiconductor Devices s P/N diode s Bipolar junction transistor (BJT) s s s Metal-oxide-semiconductor field-effect transistor (MOSFET) s s s Idealized pictures P N P N N P N N Metal (Al) Poly Si SiO 2 3 Handout 3 EEL 5225, Fall 2009, H. Xie s Diode P N Metal (Al) N P+ Planar Process N+ Basic Semiconductor Devices s CMOS Johns and Martin, Analog Integrated Circuit Design 4 Handout 3 EEL 5225, Fall 2009, H. Xie Materials Classification s By Class: s Cu, Al, Ta, alloys s oxides, nitrides, carbides, glass s photoresist, plastics, liquid crystals s Si, Ge, GaAs, InSb s particulate composites, laminates, etc. s By Property: s modulus, ductile, brittle, fatigue, ± s conductors, dielectrics, semiconductor± s ferromag., paramag., magnetostrictive± s refractive index, absorption± s oxidation states,
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5 Handout 3 EEL 5225, Fall 2009, H. Xie Crystallinity __________________ _________________ Domains Domain walls ________________ Ex: Si, GaAs Ex: Poly Si, metals Ex: thermal oxide, polymers 6 Handout 3 EEL 5225, Fall 2009, H. Xie Amorphous SiO 2 Dielectric Crystalline Si Channel Poly-Crystalline Si Gate Electrode Crystallinity Ref: Jaeger, Intro to Microelectronic Fabrication , p.39. High-resolution transmission electron microscope image s MOS Gate 7 Handout 3 EEL 5225, Fall 2009, H. Xie Crystallography Diamond structure Group IV Materials (Si) Ref: S. A. Campbell, The Science and Engineering of Microelectronic Fabrication , 2001, pp. 15, 16. Lattice Unit Cell 8 Handout 3 EEL 5225, Fall 2009, H. Xie Miller Indices Notation for Miller indices (ijk): {ijk}: [ijk]: <ijk>: To find the miller index of a plane: Step 1: Step 2: Step 3: Ref: Senturia, Microsystem Design, pg. 31
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This note was uploaded on 09/17/2009 for the course EEL 5225 taught by Professor Arnold during the Fall '08 term at University of Florida.

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Handouts2 - Basic Semiconductor Devices P/N diode Idealized pictures Fabrication Technology Part I Agenda Microfabrication Overview Layer

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