HW1_Fall09 MEMS

HW1_Fall09 MEMS - EEL5225 Principles of MEMS...

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EEL5225 Principles of MEMS Transducers (Fall 2009) HW1 Solution 1. From the specification sheet for the Kulite LEH-1AC-250 series (100 PSI model) miniature flatpack pressure transducer (see attached), determine the following a. Rated voltage input V input = rated electrical excitation = 10V d.c. b. Nominal sensor power requirements Power = V input I input = V input 2 / R sensor = (10V) 2 / 1kohm = 100 mW c. Sensor sensitivity Full_scale_output 100mV := Full_scale_input 100psi := S Full_scale_output Full_scale_input := S 1 mV psi = d. MDS and Dynamic Range, assuming a resolution of 0.01 mV for the voltage measurement system (Note the specification sheet lists “Infinitesimal” for resolution) Assuming that the output resolution is limited by rms output voltage noise, vn 0.01mV := MDS vn S := MDS 0.01psi = Hence, the minimum pressure signal is limited by the MDS while the maximum pressure in the linear range is determined by the full scale input. Pmin

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HW1_Fall09 MEMS - EEL5225 Principles of MEMS...

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