ece3901_10

ece3901_10 - September 8, 2005 5 Ion Implantation September...

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September 8, 2005 1 ECE 3901 – Semiconductor Devices Lecture 10: Device Fabrication Processes
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Oxidation September 8, 2005 2
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Oxidation thickness September 8, 2005 3
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Solid State Diffusion September 8, 2005 4
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Phosphorus Diffusion
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Unformatted text preview: September 8, 2005 5 Ion Implantation September 8, 2005 6 Lithography September 8, 2005 7 Thin film deposition: sputtering September 8, 2005 8 September 8, 2005 9 PN Diode processing steps...
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ece3901_10 - September 8, 2005 5 Ion Implantation September...

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