Fabrication - Nanotechnology: Integration I Click to edit...

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Click to edit Master subtitle style 10/21/09 Nanotechnology: Integration I
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10/21/09 Integrated Circuit (IC) Fabrication IC’s: Electronic components fabricated on a monolithic substrate • transistors (electronic switch) • diodes (rectifier) • capacitors • resistors • inductors Silicon is substrate in wide use currently (wafer 12” in diameter) V ery L arge S cale I ntegration
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10/21/09 Capacitors Resistors Inductors Transistors Discrete vs Integrated
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10/21/09 Solid State Electronics: Motivation Vacuum tubes prior to solid state (semiconductor) components Vacuum tube drawbacks • Bulky • Expensive • Unreliable • Power hungry Discrete semiconductor components available in 1950’s Integrated Circuit (late 50’s)
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10/21/09 Technology for IC’s Complex circuitry without wiring individual discrete components •Higher reliability •Less bulky Multi-step fabrication of identical circuits simultaneously • Lower cost per circuit from economies of scale • Easier manufacturing Requires expensive, sophisticated equipment • Design, fabrication, testing Historically produced enormous improvements in performance • Speed • Cost
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10/21/09 Solid State Electronics Chronology 1947: First transistor discovered • Made using pieces of polycrystalline germanium • ”Bi-polar junction transistor” (BJT) 1958: First IC demonstrated (1 transistor per circuit) • Jack Kilby (Texas Instruments) • Germanium 1960: Metal oxide-silicon field effect transistor (MOSFET) 2000: 50% of the Nobel Prize in Physics to Kilby 2006: 109 transistors per circuit
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10/21/09 Electronic Package 1. Mechanical support and protection 2. Communication with outside world 3. Heat dissipation
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10/21/09 IC Fabrication: Steps I
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10/21/09 II
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10/21/09 Basic Steps Pattern: Identify where to add or remove material Circuit Design Lithography Mask design Pattern projection and development Add Material Oxidation Diffusion Implantation Deposition Physical Vapor Deposition Chemical Vapor Deposition Remove Material Etching (Chemical) Mechanical Polishing
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10/21/09 Silicon Fabrication Process Video Presentation: “Silicon Run 1” http://www.multimedia.vt.edu/ee5545 / Originally produced 1996
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Fabrication - Nanotechnology: Integration I Click to edit...

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