Presentation 1(introduction) [Compatibility Mode]

Presentation 1(introduction) [Compatibility Mode] - MSE...

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Unformatted text preview: MSE 401/MSE 501/ELEN 437 MSE 401/MSE 501/ELEN 437 Fall 2009 Fall 2009 Fundamentals of Fundamentals of Microfabrication Microfabrication Process Process icrofabrication icrofabrication rinciples rinciples Microfabrication Microfabrication Principles Principles Class time: MWF 8:00 Class time: MWF 8:00-9:15 AM, NH 140 9:15 AM, NH 140 Instructors: Dr. Shengnian Wang Instructors: Dr. Shengnian Wang Office: IfM112 Phone: 257-5125 Email: swang@latech.edu Office hours : Monday: 10am-12pm Text: Fabrication Engineering at the Micro-and Nanoscale , tephen A Campbell 3rdEdition Stephen A. Campbell, 3rdEdition. Useful reading material (Books at library unless otherwise indicated) lummer Deal and Griffin Silicon VLSI Technology: Fundamentals Practice and Plummer, Deal and Griffin, Silicon VLSI Technology: Fundamentals, Practice and Modeling, Prentice Hall, July 2000. R. C. Jaeger, Introduction to Microelectronic Fabrication, 2 nd Edition. S.M. Sze, VLSI Technology, McGraw-Hill, 2 nd Edition, 1988. S.A. Campbell, The Science and Engineering of Microelectronic Fabrication, Oxford University Press, 2 nd Edition, 2001. Marc J. Madou, Fundamentals of Microfabrication, the science of miniaturization, 2 nd Edition, 2002. OUTLINE : Study of microfabrication process development for the realization of microelectronics ultra large-scale integration (ULSI) processes and microelectromechanical systems (MEMS) technologies, understanding of process principles, materials, measurements, and applications Project: Calculation and draw cross-section profile of a MOSFET in each fabrication step with a provided processing conditions. Term paper (graduate only): Graduate students will form 13-15 groups and each team must write a term paper on one of the provided topics. The term paper must have the sections specified below and the term paper will be graded for the individual sections. The important elements include: a thorough survey of the literature on the subject; an in-depth understanding of the phenomena related to the subject; and an innovative analysis of possible solutions based on your theoretical tudies As part of this a theoretically ased physical description of the studies. As part of this, a theoretically-based physical description of the processes considered and their applications must be provided. The topic list for the term paper will be provided later. The content of the term paper will be presented by each group in class at the end of quarter....
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Presentation 1(introduction) [Compatibility Mode] - MSE...

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