Presentation 5 suppl

Presentation 5 suppl - (a) From Table 3.1, 1.23 m 2 B =...

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(a) From Table 3.1, = 2 0 2 p 1.23 µ m 2 B 1 0 6 p 2.00 m 5 m B 7.72 x 10 exp kT hr A = 3.71 x 10 exp kT hr X i = 25 nm For T =1273 K, B = 0.0236 m 2 r and B = 0.169 m r hr A hr τ= 0.025 m () 2 236 m 2 + 0.025 m 69 m = 0.174 hr 0.0236 hr 0.169 hr t = 0.2 m 2 2 + 0.2 m 0.174 hr = 2.70 hr 0.0236 m hr 0.169 m hr
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(b) From Table 3.1, 8 5 B =3.86 x 10 2 exp 0.78 kT µ m 2 hr B A = 9.70 x 10 7 exp 2.05 kT m hr X i = 0 or T = 273 K, = .314 m 2 and B 42 m For T 1273 K, B 0.314 hr and A 0.742 hr τ= 0.2 m () 2 14 m 2 + 0.2 m 42 m = 0.398 hr 0.314 hr 0.742 hr t = 0.5 m 2 2 + 0.5 m 0.398 hr = 1.07 hr 0.314 m hr 0.742 m hr
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Thermal Oxidation of Silicon N , 2 2 0 0 n k N A B n DN B k D A s s = = = P G HP N = 0 xidation Rate Oxidation Rate Temperature Orientation Pressure
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Thermal Oxidation System Quartz Tube Wafers Quartz Carrier Resistance Heating (b) H 2 O 2 vertical furnace (a) Horizontal furnace
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Thermal Oxidation f Silicon of Silicon iO2 ce interferen ve constructi for thickness Oxide Si SiO2 ) SiO for (1.46 refraction of index n 2 2 = = n k X o λ [ ] ... , 3 , 2 , 1 k • ellipsometer - direct measurement
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Dopants Diffusion in Thermal Oxidation 2 SiO Si C C m = Segregation Coefficient.
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Presentation 5 suppl - (a) From Table 3.1, 1.23 m 2 B =...

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