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Unformatted text preview: (20 points) Process flow continued on next page. MASK TOP VIEW N-Well Formation (Diffusion) Negative photo resist Oxide and Nitride Deposition Negative Photo resist P-channel stop same mask used with positive photo resist Gate Metal Deposition Negative Photo resist Diffusion Negative photo resist MASK TOP VIEW PHYSICAL STRUCTURE P + Diffusion Negative Photo resist Oxidation Positive photo resist Metal Deposition Negative Photo resist...
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This document was uploaded on 12/10/2009.
- Spring '07