Interconnect

# Interconnect - ECE 6130/4130 Advance VLSI Systems Fall 2009...

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ECE 6130/4130: Advance VLSI Systems Fall 2009 Interconnects Prof. Saibal Mukhopadhyay School of Electrical & Computer Engineering Georgia Institute of Technology

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Reading Materials Chapter 5 and 12 : Introduction to VLSI Circuits and Systems , Uyemura, • Lecture notes (posted in T-square, under “Resources/Lecture Slides”) Chapter 9: Digital Integrated Circuits: Rabaye
Interconnect Resistance Resistance: R line = ρ ( l/A ) = ( ρ /t) × ( l/w ) = (1/ σ t) × ( l/w ) = R s × ( l/w ) R s = sheet resistance = Resistance of a wire of ( l = w) R s represents the resistance of a square region with top dimensions of w by w R line = ( R s / w ) × l = r × l, r = resistance per unit length cross-sectional area: A = t × w, ρ = resistivity, σ = conductivity

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Interconnect Resistance – contd. R line = R s x (n) = R s x (l/w) ‘n’ = number of squares from X to Y
Capacitance Interconnect line Self-capacitance: Only parallel plate component: line ox ox lw C T ε =

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Interconnect Cap.: Fringing Field () 0.222 1.15 2.8 / ox ox ox cw T t T F c m ε ⎡⎤ =+ ⎣⎦ line Cc l = ×
Circuit Model for Interconnects: Simplest Approach line line wire delay R C τ =

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Physical model of an interconnect line. R C C C C R R R In Out
Physical model of an interconnect line. [] [ ] [ ] () 2 (1 ) ( 2 ) . . . ) 1. . . 2 ) ) 22 11 , : line line line line line line CmR C m R C m R CR mm RC m RC RC m m as m we get R C rc l τ =+ + + + + ⎡⎤ + = ⎢⎥ ⎣⎦ ++ == →∞ = =

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Simple RC interconnect model.
Wire Delay

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Interconnect - ECE 6130/4130 Advance VLSI Systems Fall 2009...

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