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18 강의01강-mems개요역사[1]

18 강의01강-mems개요역사[1]

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200 학기 담당교수 : 김 ₱₿
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강의 순서 1장 : MEMS 개요 , 역사 장 : Bulk Micromachining �茡 3 장 : Surface Micromachining �茡 장 : LIGA
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참고 문헌 Gregory T.A. Kovacs, “Micromachined Transducers, Sourcebook”, McGraw Hill, 1998 Marc Madou, “Fundamentals of Microfabrication”, CRC Press, 1997 Julian W. Gardner, Vujay K. Varadan, Osama O. Awadelkarim, “Microsensors MEMS and Smart Devices”, Wiley, 2001
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강의 1. Introduction to MEMS ᆞM icro E lectroM echanical S ystems Batch Fabrication (예:IC Technology) 에너지 변환 : Electrical <-> non-electrical 궁극적 목표: Solutions to real problems, not just devices MEMS 정의 광스위치(DMD), micro pump 가속도계, 촉각센서
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