MECH466-Lecture-22 - MECH 466 Microelectromechanical...

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1 MECH 466 Microelectromechanical Systems University of Victoria Dept. of Mechanical Engineering Lecture 22: Optical MEMS July 26th, 2007 Mech 466, N. Dechev, UVic 2 Overview of Optical MEMS Passive MEMS optical components Active MEMS optical components Overview Mech 466, N. Dechev, UVic
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3 Micro-optical systems presently have application in the following areas: Optical Scanning - Medicine (minimally invasive surgery) - Small Space Inspection Optical Alignment Optical Communication - Switching - Optical Filtering - Spectrometry (Wavelength Separation) -Adaptive Optics and Free Space Communication Optical MEMS Applications Mech 466, N. Dechev, UVic 4 Easy to manipulate light - Optical systems involve photon re-direction, therefore, since photons have very little momentum, micro-actuators are easily able to manipulate photons. Simplified packaging - Optical MEMS can be sealed in packages with transparent housings, which allows light to pass through a glass window. - This allows the optical device to be protected from dust and harsh environmental conditions, unlike flow sensors, or micro tactile sensors, or other MEMS where the source of signal/phenomena must be in direct contact with the chip surface. Device size - Able to pack a large number of devices into a relatively small area/volume. Advantages of Optical MEMS Mech 466, N. Dechev, UVic
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5 The DLP micro-optical projection system was developed by Texas Instruments. It uses a matrix of micro-mirrors to selectively switch reflected light, to form a projected matrix of pixels. Example Application: DLP (Digital Light Processing) Mech 466, N. Dechev, UVic Individual Digital Micro Mirror [Texas Instruments] Constituent Parts of the Digital Micro Mirror [Texas Instruments] 6 DLP Principle of Operation Each mirror is 11 x 11 um in size, and a matrix usually consists of 1024 x 768 mirrors. Matrix of Micro-mirrors [Texas Instruments] Individual Micro-mirror [Texas Instruments] Mech 466, N. Dechev, UVic
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7 By selectively switching the mirrors on and off in the presence of a light source, the mirrors will reflect the light source ‘toward’ or ‘away’ the optical path that forms the projected image. Redirection of Light using Mirrors [Texas Instruments] Mech 466, N. Dechev, UVic DLP Principle of Operation 8 A good source of detail information for DLP technology is: http://www.dlp.com Cycling of Mirrors to Create Shades of Grey [Texas Instruments] Mech 466, N. Dechev, UVic DLP Principle of Operation DMD Matrix with Ant Leg [Texas Instr.] DMD Matrix with Salt Crystals [Texas Instr.]
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9 To create the complete projection system, the DMD (Digital Micro- mirror Device) is used with a light source, optics, a color filter and a projection lens. Complete DLP Projection System
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MECH466-Lecture-22 - MECH 466 Microelectromechanical...

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