MECH466-Lecture-18 - 1 MECH 466 Microelectromechanical...

Info iconThis preview shows pages 1–5. Sign up to view the full content.

View Full Document Right Arrow Icon

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: 1 MECH 466 Microelectromechanical Systems University of Victoria Dept. of Mechanical Engineering Lecture 18: Advanced Microfabrication Technologies July 12th, 2006 Mech 466, N. Dechev, UVic 2 EFAB Surface Micromachining Process LIGA Process Laser Micromachining Micro EDM (Electro Discharge Machining) Flip-Chip Assembly Self-Assembly Robotic Assembly Overview Mech 466, N. Dechev, UVic 3 Advanced Microfabrication of MEMS There are inherent limitations with Surface Micromachining, and Bulk Micromachining for creating different types of microstructures. A number of different advanced microfabrication technologies have been developed in recent years to create micro-parts that cannot be made with traditional approaches. It is important to note that many of these processes can only produce micro-scale parts, and cannot produce microsystems. Mech 466, N. Dechev, UVic 4 EFab Process The EFab was developed by MicroFabrica Inc. It is a multi-layer surface micromachining process, where each and every layer is planarized before the next layer is added. This allows the process to create 20+ layers of surface micromachined materials to build up very tall, 3D MEMS microstructures. A video movie to describe how the EFAB process works, is available at: http://www.microfabrica.com/efab/EFAB_works.htm Mech 466, N. Dechev, UVic 3 Advanced Microfabrication of MEMS There are inherent limitations with Surface Micromachining, and Bulk Micromachining for creating different types of microstructures. A number of different advanced microfabrication technologies have been developed in recent years to create micro-parts that cannot be made with traditional approaches. It is important to note that many of these processes can only produce micro-scale parts, and cannot produce microsystems. Mech 466, N. Dechev, UVic 4 EFab Process The EFab was developed by MicroFabrica Inc. It is a multi-layer surface micromachining process, where each and every layer is planarized before the next layer is added. This allows the process to create 20+ layers of surface micromachined materials to build up very tall, 3D MEMS microstructures. A video movie to describe how the EFAB process works, is available at: http://www.microfabrica.com/efab/EFAB_works.htm Mech 466, N. Dechev, UVic 5 EFab Process The process works as follows: A three-step process is used to generate each layer. This is repeated as many times as there are layers to build the desired complex devices. These steps are: 1. Patterned layer deposition 2. Blanket layer deposition 3. Planarization Mech 466, N. Dechev, UVic Images of EFab Process [From Microfabrica] 6 EFab Process Mech 466, N. Dechev, UVic Images of EFab Process [From Microfabrica] 7 Examples of Devices Produced by EFab Process Mech 466, N. Dechev, UVic Fluid-driven Impeller with Reduction Gearing [Microfabrica] Articulated micro-hand (flexed) [Microfabrica] Rotary Varactor (24 layers) [Microfabrica] 8 LIGA Process The LIGA (acronym from German words for lithography,...
View Full Document

This note was uploaded on 02/02/2010 for the course MECH 466 taught by Professor Dechev during the Summer '07 term at University of Victoria.

Page1 / 25

MECH466-Lecture-18 - 1 MECH 466 Microelectromechanical...

This preview shows document pages 1 - 5. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online