QUIZ_MEMS_2007sample - SAMPLE QUIZ MEMS 2007 CONCORDIA...

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SAMPLE QUIZ MEMS 2007 – CONCORDIA UNIVERSITY Answer the following multiple choice questions selecting the most appropriate and direct answer. Q1 . Which of the two basic fabrication principles: a) bulk machining and b) surface machining could be used to integrate mechanical and electrical systems on the same chip? 1) a 2) b 3) a and b 4) none Q2. What is the fabrication principle that enables the fabrication of a membrane as the one illustrated below? a) bulk micromachining b) surface micromachining c) both d) none of them Q3. The figure below represents a cantilever beam that has been released and has curved up. What type of stress is dominantly built in the cantilever’s top layer?
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a) tensile stress b) compressive stress c) bending stress d) shear stress Q4. Assume a 500 μm thick (100) orientation wafer. You wish to make a hole through the wafer in the shape of a inverted pyramid as the ones performe by anisotropic etching gent (the output hole is very small as illustrated in figure below). What is the minimum
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This note was uploaded on 02/08/2010 for the course MECHANICAL 6537 taught by Professor Stiharu during the Winter '10 term at Concordia Canada.

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QUIZ_MEMS_2007sample - SAMPLE QUIZ MEMS 2007 CONCORDIA...

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