Lecture-1 - LECTURE 1 History of Electron Microscopy...

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LECTURE 1
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Electron Microscopes: developed due to the limitations of light microscopes. Light Microscopes: are limited by the physics of light to 500-1000X magnification and a resolution of 0.2 um. The TEM (Transmission Electron Microscope) was the first type of electron microscope developed. It was developed by Max Knoll and Ernst Ruska in Germany in 1931. The “late” development of the SEM was due to the electronics involved in scanning the beam of electrons across the sample. Earliest recognized work describing the concept of an SEM: Knoll (1935) and von Ardenne (1938) – constructed a STEM by adding scanning coils to a TEM. (samples still needed to be thin (e - transparent). First SEM used to examine thick specimens (1942) by Zworykin et al. (RCA Laboratories in the U.S.) – Resolution 1 um. In the late 1940s Oatley and McMullan in England built their 1 st . SEM (by 1952 they achieved a resolution of 50 nm). Also in 1942 the first field emission electron source was developed.
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This note was uploaded on 03/22/2010 for the course MSE 6507 taught by Professor D. during the Fall '07 term at University of Florida.

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Lecture-1 - LECTURE 1 History of Electron Microscopy...

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