Lecture 4 - ME 601: Manufacturing in Micro- and Nanosystems...

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ME 601: Manufacturing in Micro- and Nanosystems Lecture 4: Extreme Ultraviolet Lithography
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Driving Innovation: Moore’s Law “Developed” by Gordon Moore, co-founder of Intel (1965) Empirical rule (not actually a law!) which predicts that the number of components per chip doubles every 18-24 months Moore’s Law turned out to be valid for more than 30 years (and still is!) Kind of a self-fulfilling prophecy: industry sees need to continuously innovate to catch up, not necessarily driven by needs for faster computers Continuously threatened by limits of patterning, etching, implantation technologies and fundamental physics of devices (ex: gate oxide thickness)
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Driving Innovation: Moore’s Law
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Coordinating Future Technology Development International Technology Roadmap for Semiconductors (ITRS) http://www.itrs.net/ Æ http://www.itrs.net/Links/2007ITRS/Home2007.htm Sponsored and developed by industrial manufacturers of computer chips, memory, and other technologies that rely on semiconductor-based technologies European Semiconductor Industry Association (ESIA), Japan Electronics and Information Technology Industries Association (JEITA), Korean Semiconductor Industry Association (KSIA), Taiwan Semiconductor Industry Association (TSIA), and United States Semiconductor Industry Association (SIA)
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Coordinating Future Technology Development ITRS Goals: identify critical challenges and encourage
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Lecture 4 - ME 601: Manufacturing in Micro- and Nanosystems...

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