Lecture 12 - ME 601: Manufacturing in Micro- and...

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ME 601: Manufacturing in Micro- and Nanosystems Lecture 12: Near-field and Zone Plate Lithography
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Zone Plate Lithography: Focusing X-rays We initially said that X-rays cannot be focused – this is true for refractive optics (optical lenses or their electric/magnetic analogue) Fresnel lenses (diffractive optics) have been around since 1823; zone plates are one variation Allow short focal lengths without massive plano-convex lenses, thus increasing transmission Used extensively in photography
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Zone Plate Lithography: Focusing X-rays Applications for focused X-rays include telescopes and spectroscopy (ex: characterization beamlines at SRC, ANL) Concentric rings of alternating dark and light regions diffract incident radiation Constant area of rings results in single focal point
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Zone Plate Lithography: Focusing X-rays Radius of nth zone depends on wavelength and focal distance: When outermost zone is small compared with focal length (r << f), radius is approximated as: For plates with many zones, the position and width of the outermost zone is calculated from the focal length: Pattern resolution for X-ray exposure depends on minimum feature size of zone plate,
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Fresnel Zone Plate Fabrication What are the design considerations? What methods can be used?
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Lecture 12 - ME 601: Manufacturing in Micro- and...

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