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Lecture 18 - ME 601 Manufacturing in Micro and Nanosystems...

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ME 601: Manufacturing in Micro- and Nanosystems Lecture 18: Nanosphere Lithography and Block Copolymer Assembly
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Self-Assembly: Bottom Up Nanoscale Fabrication Top-down (patterning from the surface of a planar substrate) vs. bottom-up (self-organization driven by fundamental physics, may be molecular Æ mesoscale) Finds inspiration from nature Intersection of biology and chemistry Bottom-up assembly is massively parallel, inexpensive, can generate structures with exquisite complexity – so what’s the catch? Key challenge: interface bottom-up methods with traditional semiconductor fabrication Self-assembly can be classified into chemical, physical, or colloidal
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