Lecture 18 - ME 601: Manufacturing in Micro- and...

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Unformatted text preview: ME 601: Manufacturing in Micro- and Nanosystems Lecture 18: Nanosphere Lithography and Block Copolymer Assembly Self-Assembly: Bottom Up Nanoscale Fabrication Top-down (patterning from the surface of a planar substrate) vs. bottom-up (self-organization driven by fundamental physics, may be molecular mesoscale) Finds inspiration from nature Intersection of biology and chemistry Bottom-up assembly is massively parallel, inexpensive, can generate structures with exquisite complexity so whats the catch? Key challenge: interface bottom-up methods with traditional semiconductor fabrication Self-assembly can be classified into chemical, physical, or colloidal Examples from Nature phospholipid: hydrophilic head, hydrophobic tail Snowflake Phase Diagram Colloidal Self-Assembly Y. Vlasov et al. Nature 414 (289), 2001 (inset) P. Jiang et al. Chem. Mater. 11 (8), 1999 S. H. Park, et al. Adv. Mater. 10 (13), 1998 Smallest (limiting) pore dimension ~ 0.15 X d particle Nanosphere Lithography Number of layers controlled by process parameters: surface chemistry, temperature, concentration Nanosphere Lithography...
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This note was uploaded on 03/23/2010 for the course MATERIAL S 601 taught by Professor Samual during the Spring '10 term at Wisconsin.

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Lecture 18 - ME 601: Manufacturing in Micro- and...

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