taller1mems - Ref sattler Hoffmann Chen Yao Dong A.sRollier...

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Ref Pull in(V) Dimensiones E D Rango V Sensibilidad sattler L Width thick ΔMpa Δum 200um 0-100v 41 200um 20um 50 9.7 0.24 76 200um 20um 100 19.4 0.26 43 200um 50um 50 10.1 0.23 81 200um 50um 100 20.1 0.25 44 200um 90um 50 10.6 0.24 85 200um 90um 100 21.2 0.25 40 200um NO 50 9.4 0.24 74 200um NO 100 18.8 0.25 Hoffmann 29 25mm 100um 60um 65 0-120v 2.24 Chen 20(Pull-down) 1.5mm NO 1.5um 300 0-20v #DIV/0! Yao NO 1mm 1um 7 NO #DIV/0! NO 1mm 2um 1.8 NO #DIV/0! NO 1mm 3um 0.7 NO #DIV/0! NO 1mm 4um 0.4 NO #DIV/0! NO 1mm 5um 0.3 NO #DIV/0! NO 1mm 1um 84 NO #DIV/0! NO 1mm 1um 56 NO #DIV/0! Dong 4.6 0.85 0.18 A.s Rollier 250um 30um 2um
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Materiales Medio Δelectrodos SiO2-Au-SiO2
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taller1mems - Ref sattler Hoffmann Chen Yao Dong A.sRollier...

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