lecture_19_pre

lecture_19_pre - u x z u y x y u z Laser Cantilever Probe...

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ME 421 Mechanical Dynamics and Control Fall 2006, Lecture 19 Today’s topics • Vibration isolation analysis; • Examples of frequency-domain vibration analysis (Sec. 9-1, 9-2, 9-3);
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Vibration Isolation for SPM.
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Atomic Force Microscope Imaging (AFM) PZT Sample z-axis Feedback Controller x , y -axis Scanner Control Optical Sensor Image x z y x, y
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Unformatted text preview: u x z u y x y u z Laser Cantilever Probe PZT x z y Cantilever G F K G Sample-Prob Force ~ ~ Cantilevers: 125 m to 450 m long . Probe: 1000 times smaller. Typical probe tips: < 10 nm in radius. Atomic Force Microscope (AFM) Application: Vibration Isolation Dynamics Analysis Transmissibility Ratio...
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lecture_19_pre - u x z u y x y u z Laser Cantilever Probe...

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