Subject 3 IC compatible processing

Subject 3 IC compatible processing - Week (2 meetings/wk)...

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Unformatted text preview: Week (2 meetings/wk) Contents (wk starting 1/25) Introduction ; Characterizing nanoscale structures (2/1) Processing I : how small features are made; Microfabrication, IC and IC compatible: lithography, deposition, etc. Thermodynamics : effects of small systems, surface energy and curvature, Laplace pressure, melting point depression. (2/8) Kinetics , surface diffusion, surface smoothing, sintering. Mechanical properties of nanostructured materials. (2/15) Nanoporous materials : Au fuel cell and catalysis (Erlebacher); Processing II : how the micro/nano structures are made; Nanoparticles ; Self-assembly, functionalized nanostructures, (Searson) (2/22) More on chemical synthesis; Nanoscale reactive multilayers ; (3/1) Electronic properties and devices : scattering, transport, mobility, mean free path, quantum confinement (dots and wells), tunneling, ballistic transport, single-electron transport (3/8) Bio nanosystems & properties (Mao); Nano in fluids (Cammarata) (3/15) Spring vacation (3/22) Nanostructures and devices for optical properties (3/29) Magnetic nanostructures/properties (4/5) Student project presentations start (4/12) Student project presentations (4/19) Student project presentations (4/26) Student project presentations Subject 3 Processing I How small features are made: IC microfabrication:...
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Subject 3 IC compatible processing - Week (2 meetings/wk)...

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