10a IC Fabrication

10a IC Fabrication - EE115C Digital Electronic Circuits...

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EE115C Digital Electronic Circuits Lecture 10a: IC Fabrication
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EE115C 2 CMOS Inverter: Side and Top Views Side View (Cross-section) Top View Courtesy: CMOS VLSI Design, Weste …
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3 CMOS Inverter: Mask View Top View Courtesy: CMOS VLSI Design, Weste … n-Well poly Silicon n+ diffusion p+ diffusion contacts Metal 1 EE115C
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4 IC Fabrication and Layout Layout A collection of mask views or mask drawings Designer prepares them based on schematics Usually with the help of software Magic, Cadence Virtuoso, etc. Often automated in the case of digital circuits Fabrication Process A collection of physical and chemical processes Photolithography – “writing with light in stone” Foundry builds die according to layout drawings E.g., IBM, Taiwan Semiconductor Manufacturing Company (TSMC) … Incredible quality control EE115C
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5 Example Cycle: Patterning of SiO 2 Si-substrate Si-substrate Si-substrate (a) Silicon base material (b) After oxidation and deposition
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This note was uploaded on 04/18/2010 for the course EE 115C taught by Professor N/a during the Spring '10 term at UCLA.

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10a IC Fabrication - EE115C Digital Electronic Circuits...

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